The XLR 1000ix introduces higher repetition rate of 6.75kHz, first light source of this category in market, enabling a 36% reduction in speckle contrast and improvement in local dose variation and local CDU.

It also delivers productivity and cost-of-ownership improvements, enabling a 20% increase in time between service intervals enabling a single touch per year. This is driven by Cymer’s newly developed field-tested chamber and optics modules to support new functionalities.

Further improvements in Bandwidth Control with DynaPulse™ 3,  provides enhanced control in wafer processing.

The system has been empowered with He-Free operation and ADAPT™, a holistic machine learning technology to increase availability through fewer calibrations and gas refresh events while enabling sustainability improvements through lower power and gas consumption.