Cymer Products

XLR 900ix

Cymer’s XLR 900ix is the latest in advanced light source technology.

Category:
Description

The XLR 900ix introduces new speckle reduction technology, enabling a 30% reduction in speckle contrast and enabling significant local CDU improvement. It also delivers productivity and cost-of-ownership improvements, enabling a 25% increase in time between service intervals enabling a single touch per year. This is driven by Cymer’s new field-tested chamber and optics modules, which are in production in more than 140 XLR systems. The system also features new machine learning technology to increase availability through fewer calibrations and gas refresh events while enabling sustainability improvements through lower power and gas consumption.

Additional Information
Features

5th generation chamber technology to enable higher availability
Optical pulse stretching technology to improve local CDU
DynaPulse™ 2 bandwidth control technology

Upgrade Features

ADAPT

Chamber

Dual Recirculating Ring

Wavelength

193 nm

Power

60-90W

Bandwidth Control

300 +/- 2 fm wafer average with DynaPulse™ 2