ArF DRY LIGHT SOURCES - Cymer
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ArF DRY LIGHT SOURCES

ArFd: Lithography Tools at 193 nm Wavelength

ArF dry lithography is essential in the chipmaking process. ArF dry lithography light sources, like Cymer’s XLA 105, are being used to consistently pattern a significant number of mid-critical layers on wafers, while providing extended module lifetimes and greater critical dimension (CD) control.

As CDs continue to shrink and drive demand for even finer resolution on the most critical layers, ArF dry lithography tools are also patterning the non-critical layers, historically patterned by KrF light sources. Cymer’s dry lithography light sources provide reliability and cost efficiency, and are ideal for use in high volume manufacturing.

XLA 105

Chamber Dual MOPA
Wavelength 193 nm
Power 45W
Bandwidth Control <500 fm

XLA 105

ArF dry lithography is essential in the chipmaking process. ArF dry lithography light sources, like Cymer’s XLA 105, are patterning a significant number of mid-critical layers on wafers, while providing extended module lifetimes and greater critical dimension (CD) control.  As CDs continue to shrink and drive demand for even finer resolution on the most critical layers, ArF dry lithography tools are also patterning the non-critical layers, historically patterned by KrF light sources. Cymer’s dry lithography light sources provide reliability and cost efficiency, and are ideal for use in high volume manufacturing.

XLR 700ix

The XLR 700ix provides chipmakers tighter bandwidth control (300 +/-5fm) that essentially eliminates bandwidth as a source of process variation for on-wafer performance. Cymer’s patented technology applies high-speed closed loop control on a pulse-by-pulse basis, resulting in extremely stable performance.

XLR 700ix

Chamber Dual Ring
Wavelength 193 nm
Power 45-90 W
Bandwidth Control DynaPulse™

Cymer’s range of ArF excimer laser light sources provide leading edge optical and power performance for high volume semiconductor manufacturing applications.

Scanner-Laser Associations

Scanner Model
XLA 105
XLR 700ix
ASML XT:1460
ASML XT:1460
ASML XT:1460
ASML NXT: 1470
ASML NXT: 1470
ASML NXT: 1470
Nikon S322
Nikon S322
Nikon S322