ONPULSE - Cymer
14304
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ONPULSE

HIGH AVAILABILITY

PREDICTABLE COST PER WAFER

OPERATIONAL SIMPLICITY

EXPERT SERVICES

>2500

ArF immersion, arf dry and krf light sources

100%

light source coverage of arf immersion systems

94%

of all Cymer pulses covered

>99%

uptime

ONPULSE SERVICE

To improve system predictability and availability, the OnPulse Service Program consists of several critical features including:

SCALABLE COSTS

OnPulse allows chipmakers to partner with Cymer to minimize the impact of chip production cycles.  By aligning through pulse usage, Cymer is able to scale costs with production needs and develop solutions that drive the industry’s high availability even higher.

OPTIMAL LIGHTSOURCE PERFORMANCE

OnPulse provides first access to the latest technology enhancements to enable the industry leading light source performance.  Synchronized Preventative Maintenance provides a proactive maintenance methodology to schedule service events as well as consolidate multiple service actions into one event to improve tool predictability, availability, productivity, and reduce unscheduled downtime.

MANAGED LOGISTICS

Leverages Cymer’s worldwide logistics network to enable optimal part availability, reduce customer inventory cost and provide the fastest response times.  With locations in strategic locations worldwide, Cymer’s support infrastructure provides unparalleled security for enabling the total coverage provided with OnPulse.

PROACTIVE MONITORING

Cymer OnLine (COL) Servers monitor light source health in the customer’s fab and utilize advanced fault detection algorithms to identify early warning signs, enabling maintenance to be scheduled at factory convenience before issues become unplanned production disruption.  Tactical Operations (TacOps) at regional centers provide close technical support to local teams while the OnPulse Source Center at Cymer headquarters provides worldwide monitoring and analytical expertise to enable faster decision making for our product and service teams.

ONPULSE FEATURES

As part of the program, OnPulse customers are the first to receive standard and upgrade new features that enable increased tool availability, tighter process control and improved wafer quality. Standard OnPulse features include:

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OnPulse Plus™

Provides real-time light source performance monitoring of critical parameters enabling a more complete understanding of light source impact in fab automation.

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Sustainability Solutions

Enables improved total cost of ownership through neon, helium, water and power reduction technologies.

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System Updates

Delivers latest enhancements to improve light source predictability and availability through technologies developed exclusively for OnPulse customers.