ELS-7010 - Cymer
15343
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Cymer Products

ELS-7010

The ELS-7010 is the world’s leading KrF light source.

Category:
Description

The ELS-7010 is one of the leading enablers of new memory architectures such as 3D NAND and is trusted for producing the bulk of layers for Internet of Things and automotive chips. It is also used around the world for high volume manufacturing for patterning the non-critical layers for the most advanced chips due to its cost efficiency. Cymer continues to innovate by introducing improvements that provide up to 50W maximum power output.

Additional Information
Features

Reduction in neon consumption by 50%
Helium free operation

Software Upgrades

GLX gas management

Upgrade Features

50W power output

Chamber

Single Oscillator

Wavelength

248 nm

Power

30-40 W