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KrF Light Sources

Lithography Tools at 248 nm Wavelength
Cymer has been providing KrF light sources for high volume chip production since 1996 when chipmakers reached the 250nm production node, which required the adoption of DUV light sources in the fab. Over the years, Cymer has developed and sold a variety of increasingly powerful and productive KrF light sources, which have provided our customers with the resolution needed for continually shrinking CDs, and the throughput and reliability required for cost-effective production.

The latest in Cymer KrF technology significantly reduces cost of operation through extended module lifetimes. Improved Line Narrowing Package (LNP) and Wavelength Stabilization Module (WSM) ensure optimal focus control, maximum exposure latitude, and improved CD control.
 
ELS-7010x:  Cymer's Field Selectable KrF Light Source
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The ELS-7010x is the world's first field-selectable flexible power KrF light source. The ELS-7010x KrF product from Cymer is built on the proven ELS-7000 platform with MTBE >2000hrs. The technically advanced ELS-7010x meets the requirements of high volume production of sub-0.10 micron devices on 248 nm exposure tools. The ELS-7010x offers customers unique flexibility in optical output and optical performance that enables tool optimization for low CoO or maximum performance.
Features include:
  • Field-selectable 30W - 50W power
  • Low Cost of Operation 
  • Reliability


ELS-7010:  Cymer's Leading KrF Light Source
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The ELS-7010 is designed for high-volume production of sub-0.10 micron semiconductor devices at 40W power. A cost effective solution for less critical layers, the ELS 7010 combines the proven Cymer platform with the latest productivity enhancements.
Features include:
  • Optimal focus control and improved CD control 
  • Accurate dose control 
  • Low Cost of Operation 


Earlier Generation KrF Light Sources:

Model Chamber Wavelength Repetition Rate Power
ELS-7000 Single Chamber 248 nm 4kHz 30W
ELS-6010 Single Chamber 248 nm 2.5kHz 20W
ELS-6000 Single Chamber 248 nm 2kHz 20W
ELS-5010 Single Chamber 248 nm 1kHz 10W
ELS-5000 Single Chamber 248 nm 1kHz 10W

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