Light sources are Cymer’s specialty, specifically Deep Ultraviolet (DUV) and Extreme Ultraviolet (EUV) light sources. Your phone, tablet, phablet, and an increasing number of electronic devices are powered by integrated circuits (aka microchips). Each chip is the end product of the semiconductor photolithography process, an integral part being the optical lithography step that is enabled by a light source.

When light from a DUV light source passes through a photomask, or in the case of an EUV light source reflects off a photomask, and onto a wafer, the circuit pattern of the mask is transferred to the wafer. The difference between DUV and EUV light is wavelength: DUV’s wavelength is 248nm or 193nm; EUV light sources deliver a wavelength of 13.5nm. The wavelength is what determines how small chip features can be, so shorter wavelengths translate to smaller features.

DUV Sources | EUV Sources