The XLR 900ix introduces new speckle reduction technology, enabling a 30% reduction in speckle contrast and enabling significant local CDU improvement. It also delivers productivity and cost-of-ownership improvements, enabling a 25% increase in time between service intervals enabling a single touch per year. This is driven by Cymer’s new field-tested chamber and optics modules, which are in production in more than 140 XLR systems. The system also features new machine learning technology to increase availability through fewer calibrations and gas refresh events while enabling sustainability improvements through lower power and gas consumption.