DUV Sustainability Program: Going Longer, Working Harder, and Giving More

The sports world offered some impressive comeback stories in 2016; storybook endings for teams that just kept trying until they succeeded. In June the Cleveland Cavaliers overcame a three-games-to-one deficit to win the NBA Championship, and in early November the long-suffering Chicago Cubs fans celebrated a World Series victory after 108 years, a three-games-to-one deficit, and a back-and-forth seven-game series.

Equally impressive but less well known—it wasn’t televised, after all—is the success of the Cymer DUV Sustainability Program.

Anyone who owns a car is familiar with Cost of Ownership (CoO)—it’s not just the initial purchase price, but the costs of operating the car—fuel, insurance, repairs, maintenance—the entire time you own it. Just because the purchase price is right doesn’t mean it’s a sound long-term investment. The same applies to semiconductor lithography equipment. That’s why Cymer is dedicated to developing and delivering sustainability initiatives that reduce CoO while reducing chipmakers’ business risk profile.

How does the extended Cymer team do this? By using a comprehensive support model as part of OnPulse™. The three-pronged approach of the Cymer sustainability initiative is based on a proven architecture design for both ArF and KrF platforms: neon reduction and recapture, helium reduction and elimination, and power reduction.

Cymer DUV Sustainability Program

The goal? Deliver enhanced productivity and predictable costs with ongoing technology enhancements that reduce cost and extend the life of installed tools while maintaining reliable performance.

Does it work? Yeah, you could say that: since 2014 Cymer DUV sustainability initiatives reduced the total annual running cost of ArF light sources by roughly 50%. So, using the car analogy, imagine  that the manufacturer said, “Hey, how would you like me to upgrade your car to double the gas mileage?”

You’d be a devoted brand evangelist and recommend that car manufacturer to everyone you know. And that’s the point. For a chipmaker lithography tools can be the most expensive equipment in a fab; the light source running those tools is one of the most expensive operating cost of the fab, and each fab usually has multiple light sources. That 50% reduction offered by Cymer has a measurable, significant impact on the bottom line. Customers operating Cymer legacy platforms to the latest model, the XLR 700, can readily enjoy all of the CoO reductions in place.

Customer service, an effort to boost a customer’s business long after the initial sale, matters a great deal. Why? Because price and quality can get you into the game, but service wins the game.