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TCZ's Thin Beam LTPS Processing Technology
Accelerating the FPD Market

Flat panel display designers continue to develop displays that need to be brighter, with richer more vivid colors, have faster video capability, provide added functionality such as touch screen capability, work equally well in sunlight and shade, be more durable, all at a lower cost. To meet these growing market demands for advanced LCD and OLED displays, TCZ developed the patented Thin Beam LTPS (low temperature poly silicon) Processing Technology — an innovative production technology for fabricating flat panel displays.
 
Thin Beam LTPS Processing improves throughput and reduces the cost of laser crystallization for LTPS display manufacturers. Using a combination of advanced laser and optics, the TCZ system uses a 730 mm x 5 micron beam to rapidly process an entire Gen 4 panel in a single pass, processing the entire substrate in roughly 60 seconds. A Gen 5.5 panels is processed in two passes in roughly 200 seconds. The process is compatible with current ELA and SLS type display manufacturing processes, making the TCZ system a drop in replacement for current manufacturing lines. Thin Beam LTPS Processing offers a combination of immediate and long-term benefits to display makers, such as:
  • Market leading productivity by increased throughput and uptime as a result of a wider process window, high available laser power, and superior system stability.
  • Increased display yield due to the highly uniform processing beam
  • Increased substrate yield since the tool exposes the entire width of the substrate (up to 730mm) in a single pass with a thin (~5 microns) beam, thereby avoiding stitching
  • Flexibility to use the TCZ system with your current display manufacturing process, based on the ability of the TCZ system to support current ELA and SLS crystallization processes. 
  • Amortization of equipment cost as Thin Beam LTPS Processing provides the flexibility to support AMLCD (active matrix liquid crystal,) SOG (System-on-Glass), and advanced OLED (Organic Light Emitting Diodes) display applications

 


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