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Cymer user documentation and training materials are available on CD. The CD contains both online and printer-friendly formats.
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Technical Documentation
Information Products is responsible for defining, developing, and producing user documentation for Cymer products. User documentation is developed for many levels of users, from the newly-trained operator to the experienced field service engineer. Cymer's documentation is distributed to DUV stepper and scanner manufacturers and end-users world-wide.
Laser Products
Excimer Lasers for Microlithography Manual
The Excimer Lasers for Microlithography Manual discusses how laser theory applies to Cymer's laser optical imaging system and how Cymer's lasers generate and control DUV laser light.
Laser Safety
The Laser Safety Manual provides comprehensive safety guidelines, safety labels and their location, and precautions for working on and around the laser. This manual should be fully understood before preceding to any other manual.
Site Preparation
The Site Preparation Manual describes facility requirements for the laser.
Installation
The Installation Manual provides installation instructions, test procedure forms, and instructions for repacking the laser for shipment to the end-user.
Operations
The Operations Manual describes the laser characteristics, operation, and its routine maintenance requirements.
Software Reference
This supplement provides the current release software configurables, errors and warnings, and diagnostics in both summary and descriptive forms.
Diagnostic PC Manual
The Diagnostic PC Manual explains how to download information from the laser, such as configuration data and diagnostic data to a PC connected to the laser on which the Diagnostic PC program has been installed.
Interface Specification
The Interface Specification provides engineering details for laser integration into a DUV lithography system, including signal descriptions, data syntax, and communication protocols.
Level I Service
The Level I Service Manual describes preventative maintenance service including procedures for consistent system performance and a complete description of system interlocks.
Level II Service
The Level II Service Manual provides troubleshooting information for field engineers. Information is presented by module with associated schematics. A description of system interlocks is also included.
Service Manual - 7000 Series
The Service Manual - 7000 Series provides troubleshooting information necessary to isolate and solve problems with the laser, including diagnostic data, error, warning message and configurables. Also described are Level I and Level II preventative maintenance service, including procedures for consistent system performance.
Illustrated Parts Catalog
The Illustrated Parts Catalog provides an illustrated listing of the major parts required for Level I and Level II maintenance. The part number, shipping weight, and measurements are included.
CUBIT Operations Manual
The CUBIT Operations Manual describes installation and operation of the Cymer Ultraviolet Beam Imaging Telescope to allow rapid assessment of chamber alignment and beam characteristics of Cymer's DUV excimer lasers.
Removal and Replacement Procedures (5000 Series only)
The Removal and Replacement Procedures provides instructions on the removal and replacement of laser modules, including test and calibration procedures.
e-Diagnostics
CymerOnLine™ Overview
CymerOnLine™ is a web-based laser information system that provides critical performance and diagnostic information. The software incorporates laser data acquisition for remote, automatic access to one or multiple installed lasers connected to the network.
Installation Guide
The CymerOnLine™ Installation Guide explains how to install the software used by CymerOnLine™.
Administration Guide
The CymerOnLine™ Administration Guide describes how to configure the software for specific sites and administer CymerOnLine™ functions.
User Guide
The CymerOnLine™ User Guide describes how to obtain laser status, check individual equipment operation, view laser summaries, and obtain other performance and diagnostics data.
Information Products is also responsible for supporting Cymer's Technical Training Department with training materials and curriculum development.
Global Service Contact Information
Within the USA, call 1-888-My-Cymer (1-888-692-9637)
Outside of the USA, please call closest field service center.
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