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XLR 600i
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Ring Technology Enabling 32nm Double Patterning Lithography and Beyond
Product Overview
XLR 600i is a 90W light source built on the production proven XL Series platform. It is based on the same Ring Technology as the XLR 500i and includes long pulse durations for longer optics life. Ring Technology – an abbreviation for “Recirculating Ring” – is the dual chamber architecture designed to improve the dose stability delivered on wafer. Unlike previous light source architectures, Ring Technology addresses fundamental dose control performance and solves current cost of ownership limitations. A XLR 500i can be upgraded to a XLR 600i, providing extendibility to double patterning applications.
Features
- Ring Technology
- Longer Consumable Lifetimes
- Standard E95 Bandwidth Metrology
- Active Bandwidth Stabilization (ABS)
- Gas Lifetime eXtension (GLX™)
- Production Proven Platform (XL Series)
Benefits
- 1.5X improvement in energy stability to enable superior dose control and CD uniformity
- 20% lower Cost of Consumables (CoC)
- Spectral performance measurement and control to minimize Optical Proximity Errors (OPE)
- High availability due to fewer gas refills
- Reliable platform offering maximum availability with minimum risk
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