Providing leading edge optical and power performance now and in the future
The XLA 105 is Cymer's second-generation, leading-edge argon fluoride (ArF) light source to feature the production-proven, dual-chamber Master Oscillator Power Amplifier (MOPA) platform—enabling both ultra line-narrowed bandwidth and 40 W of output power. Because the XLA 105 is built on the existing XL Series platform, customers will enjoy seamless integration into their existing processes and rapid time-to-yield.
By utilizing the ArF (193 nm) exposure wavelength, the XLA 105 enables chip design rules to shrink, which leads to faster processing speeds and boosts memory capacity per chip. With an ultra line-narrowed spectral bandwidth of ≤ 0.20 pm FWHM, the XLA 105 provides the light that enables high contrast imaging for lithography tools with an numerical aperture (NA) up to 0.93.
Consider these benefits of the XLA 105:
- MOPA operation increases consumable module lifetimes and lowers total consumable costs by approximately 50 percent.
- Twice the pulse energy and fewer pulses per exposure window ensures that lithographers experience increased cost savings.
- Superior pulse energy and wavelength control technology enable tight control of exposure dose and wavelength stability.
- Ultra-line narrowed spectrum bandwidth (<=0.20pm FWHM, <=0.50pm E95%) enables support of the 65nm node.
XLA 105 HP
The XLA 105 HP is a productivity improvement of the XLA 105 that extends the gas lifetime of the current system. Additionally, this High-Performance laser is equipped with the more sensitive laser bandwidth metrology (E95%) for greater CD control using Optical Proximity Correction. This feature is beyond the FWHM reporting currently available on the XLA 105.
Features
- Gas Lifetime eXtension (GLX™)
- Standard E95% Bandwidth Metrology enabled by BAM (Bandwidth Analysis Module)
Benefits
- Higher scanner availability due to fewer laser gas refills
- Higher confidence in CD control with Optical Proximity Correction (OPC), enabled by improved laser bandwidth reporting.
- Reliable platform offering improved availability with minimum risk
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