The light source is a critical element to the photolithography scanner. Below lists how the light sources are linked to scanner systems from the key manufacturers; ASML, Nikon and Canon.

ArF immersion (193 nm)
		XLR 600ix	XLR 500i
ASML	NXT:1950
	XT:1950
Nikon	S620
	S610

 

ArF Dry (193 nm)
		XLA 105 HP
ASML	XT:1450
Nikon	S310
Nikon	S320
Canon	AS4

 

KrF (248 nm)
		ELS-7010
ASML	XT:1000
	XT:8xx
Nikon	S210
	S208
Canon	ES6