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Light Sources by Application

With every new light source technology chipmakers are able to pattern smaller and smaller features on critical layers, keeping Moore's Law alive.

Light Sources by Application
 
Wavelength         Double Patterning
248 nm           ELS-7010x  
193 nm Dry                                    XLA 105 HP  
193 nm
Immersion
                                                                XLR 500i  
  XLR 600ix                   
           
   130 nm  90 nm    65 nm   45 nm    32 nm           22 nm
  Minimum Feature Size
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