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Light Sources by Application

With every new light source technology chipmakers are able to pattern smaller and smaller features on critical layers, keeping Moore's Law alive.

Light Sources by Application
 
Wavelength         Double Patterning  
248 nm           ELS-7010    
                ELS-7010x    
193 nm Dry                                    XLA 105 HP    
193 nm
Immersion
                                                                XLR 500i    
  XLR 600ix   
             
   130 nm  90 nm    65 nm   45 nm    32 nm 22 nm
  Minimum Feature Size
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