Cymer's exclusive Gas Lifetime eXtension (GLX™) Control System extends the maximum time between gas exchanges, increasing scanner availability, and provides additional light source operating stability. Achieve a positive return on investment in less than six months.
 

Three generations of GLX. High productivity is particularly essential as DUV immersion lithography migrates to double patterning. Discharge chamber gas management functions can contribute to DUV light source downtime.  Cymer’s GLX, GLX2™ and iGLX™ control systems significantly increased uptime over original gas management technology.

          
 

Easy to upgrade. The iGLX control system is a software update available for all new and installed XLR and XLA systems. Field upgrades can be combined with scheduled maintenance.
 

Increase availability and wafer output
iGLX extends gas lifetime from 2B pulses to 4B pulses and includes automated gas optimization, eliminating the need for periodic, manual gas optimization. As a result, downtime drops 70% compared to GLX2. This ensures the light source is operating at optimal efficiency throughout.
 

Learn more about Cymer GLX technology
For more information or to schedule an installation, please contact your scanner manufacturer or your Cymer Account Manager.