TCZ-900X High Volume Thin Beam LTPS Processing System

Developed for creating highly uniform LTPS (low temperature poly silicon) material of highest electron mobility and ultra-smooth surface roughness, the TCZ-900X presents an innovative production system for fabricating flat panel displays.

Besides improving uniformity, electron mobility and surface roughness of the LTPS material, TCZ targets to provide display makers with industry leading productivity and yield. Utilizing proprietary light source technology of Cymer and the comprehensive optics expertise of Carl Zeiss, the TCZ-900X has been designed to extend light source power, beam stability and processes control to levels beyond those obtainable with laser annealing systems and -processes currently available in the market.

With Cymer's high power XLX 200 light source and with high performance optics systems provided by Carl Zeiss, the TCZ-900X features:

• Precision handling of substrates sizes up to 920 mm x 730 mm (Generation 4)
• Comprehensive system- and module metrology for improved stability and control
• Full 730 mm beam length for scanning substrates in single passes to avoid stitching
• Multi-kHz laser repetition rates facilitating substrate scan speeds of up to 176 cm²/s, compatible with cycle times of 100 seconds or less

 

    

Please contact Sales & Service for detailed Product Specifications or Demonstrations.