| Making Production Flexible
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The ELS-7010x is the world’s first field-selectable flexible power KrF light source. Never before have chipmakers had the freedom to increase or decrease power on a single KrF light source in order to optimize throughput and productivity.
Power flexibility offers chipmakers a new level of control that can be used to optimize productivity. The ELS-7010x light source provides manufacturers with the flexibility of optimizing power for different process steps by adjusting the power of the light source between 30W and 50W. If utilization decreases, the ELS-7010x can operate at a reduced power level to provide a more cost effective solution to the changing market conditions.
The ELS-7010x product includes GLX (Gas Lifetime eXtension) technology, which reduces the system downtime required for laser gas exchanges by a factor of three. This gives chipmakers an even higher system uptime, leading to increased wafer throughput. The ELS-7010x product is available under Cymer’s OnPulse Program. Together with OnPulse, the field-selectable 30W – 50W ELS-7010x provides customers with a powerful tool to meet the ever changing demands of semiconductor wafer fabrication.
| Specifications |
| Configuration |
|
Single Chamber |
| Gas |
|
KrF |
| Wavelength |
|
248 nm |
| Application |
|
Dry |
| Power |
|
30W - 50W Extendable |
| Repetition Rate |
|
4kHz |
| Pulse Energy |
|
7.5 - 12.5mJ |
| Spectral Bandwidth |
|
FWHM < 0.35 pm |
|
|
Features
- Field-selectable 30W - 50W power
- Low Cost of Operation
Benefits
- Adjust power between 30W and 50W for more cost effective control of wafer throughput production for changing market conditions.
- Improved Line Narrowing Module (LNM) and Wavelength Stabilization Module (WSM) ensure optimal focus control, maximum exposure latitude, and improved CD control.
- The ELS-7010x product includes GLX (Gas Lifetime eXtension) technology, which reduces the system downtime required for laser gas exchanges by a factor of three.
- Cymer’s VERRO® technology provides “on-the-fly” optimization of pulse energy and repetition rate according to specific exposure conditions, such as resist dose sensitivity and optical transmittance.
- Cost of operation has been significantly reduced through new technology to extend module lifetimes.
- Compatible with Cymer OnLine e-Diagnostics and performance monitoring, enabling remote troubleshooting and predictive maintenance.
- Designed for excellence, the ELS-7010x complies with stringent Semiconductor Industry safety standards.
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