The technically advanced ELS-7010 meets the requirements of high volume production of sub- 0.10 micron devices on 248 nm exposure tools. The ELS-7010 offers chipmakers a 4 kHz, 40 W optical output, plus ultra-narrowed bandwidth performance and high-speed wavelength control. Advanced architecture and materials incorporated into the design of the ELS-7010 significantly reduces the light source cost of operation.

Features

• Optimal focus control and improved CD control   
• Accurate dose control   
• Low Cost of Operation   

Benefits

• Improved Line Narrowing Package(LNP) and Wavelength Stabilization Module (WSM) ensure optimal focus control, maximum exposure latitude, and improved CD control.  
• Proprietary design enhancements ensure accurate and better energy dose control. 
• The MICROINJECT^® gas algorithm provides superior energy stability while eliminating nonproductive time due to gas injections. 
• Cymer’s VERRO^® technology provides “on-the-fly” optimization of pulse energy and repetition rate according to specific exposure conditions, such as resist dose sensitivity and optical transmittance.  
• Cost of operation has been significantly reduced through new technology to extend module lifetimes.  
• Compatible with Cymer OnLine e-Diagnostics and performance monitoring, enabling remote troubleshooting and predictive maintenance.  
• Designed for excellence, the ELS-7010 complies with stringent Semiconductor Industry safety standards.