Real-time monitoring. Higher yield

Cymer has introduced a suite of data collection, reporting and analysis products that enable tighter process control and improved wafer quality. For OnPulse™ customers.

Cymer's OnPulse Plus data product provides real-time light source parameter monitoring and lot-level event correlation. Key parameters include energy, wavelength and bandwidth.

Cymer's SmartPulse data product is the first data management tool to provide wafer-level light source parameter monitoring to enable direct correlation to on-wafer performance for improved process control and yield.

SmartPulse also introduces a unique beam metrology module that delivers real-time beam performance data from the light source, resulting in a comprehensive data set that includes beam pointing, divergence, energy density and polarization.

Value/Benefits
	Prevent rework by avoiding excursions Prevent yield drop by establishing limits correlated to process limits
	Prevent yield drop by adding new metrology to monitor imaging-critical light source parameters Optimization of litho process by correlating on-wafer performance to light source parameters

 
Easy to upgrade

OnPulse Plus™ is available for all dual-chamber ArF (XLA and XLR) light sources as well as single-chamber KrF (ELS 6000 and 7000 series) light sources. SmartPulse™ is available for all dual-chamber ArF (immersion and dry) light sources. A data collection module is installed by Cymer on the light source and a Cymer data server collects, analyzes and reports the information for all connected light sources. SmartPulse also includes new on-board beam metrology that is installed on the ArF light sources.

Easy to use
Light source data can be accessed within the fab network from any workstation with the right credentials. Designated users can monitor light source performance remotely and set alarm limits for critical parameters. Data plots can be manipulated and data downloaded to the local workstation for further analysis.

Secure data
Light source data stays within the secure fab network and follows the fab’s security protocols. The Cymer data server resides inside the fab.

Extendible
Once installed, this data infrastructure can be easily upgraded with the latest features and capabilities.

Learn more about Cymer data products
For more information or to schedule an installation, please contact your scanner manufacturer or your Cymer Account Manager.