| Field-Extendable Light Source that Grows with your Application
 Cymer's XLR 600ix is the world’s first field selectable argon fluoride (ArF) light source technology, specifically designed to adapt to the changing power requirements on the fab floor. The XLR 600ix is a 60W to 90W flexible ArF light source for 32nm Double Patterning designed to expand with productivity demands.
Built on the production proven XL Series platform, the XLR 600ix is based on Recirculating Ring Technology and includes long pulse durations for longer optics life. Ring Technology is the dual chamber architecture designed to improve the dose stability that enables improved critical dimension (CD) uniformity on wafer. The advantage of Ring Technology, over previous light source architectures, addresses fundamental dose control performance and addresses current cost of operation challenges in relation to 32nm Double Patterning
An extension of the XLR 500i, the XLR 600ix has the added advantage of field selectable power from 60W to 90W, providing an unprecedented level of flexibility in power management. For applications that require only 60W, the advanced Power Optics™ in the XLR 600ix result in a 2x increase in optics lifetime, further lowering the operating cost. Easily switchable in the field, the XLR 600ix can be used for high power applications when needed. The XLR 600ix includes further advances in dose, bandwidth and wavelength stability, a key benefit for high power, high throughput applications. A XLR 500i can be upgraded to a XLR 600ix, providing extendibility to double patterning applications.
| Specifications |
| Configuration |
|
Dual Chamber Recirculating Ring |
| Gas |
|
Argon Fluoride (ArF) |
| Wavelength |
|
193 nm |
| Application |
|
Double Patterning/Immersion |
| Power |
|
60W - 90W Selectable |
| Repetition Rate |
|
6kHz |
| Pulse Energy |
|
15mJ |
| Spectral Bandwidth |
|
E95 <0.35pm |
|
|
Features
- Selectable power (60-90W)
- Ring Technology
- Improved power optics lifetimes
- Active Bandwidth Stabilization
- Gas Lifetime eXtension (GLX)
- Production Proven XL Platform
Benefits
- Get the added performance improvements today and switch to higher power in the fab when needed.
- Designed for Double Patterning applications.
- 1.5X improvement in wavelength and bandwidth stability
- 2X improvement in energy stability
- Longer intervals between gas refills
- Lower Cost of Operation compared to other 60W light sources
|
